Characteristics
- Can be used with various wafer sizes (3, 4, 5, 6, 8, 12 inches)
- For each wafer size setup replacement can be performed by changing the position of the stopper pin.
- Printout instruction issued (to printer or PC) by lift lever.
- Data collection function (option): The RS-232C function in combination with the data link software makes it possible to send data automatically for each workpiece measurement to Microsoft Excel, running on a PC.
- Print function: An optional printer can be connected to the BCD output equipped as standard on the display unit for automatic printout of data for each workpiece measurement.